| Cosmovac Industrial Co.,Ltd. |
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Item Number:
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DASH700 |
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Product Name:
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DLC Coating equipment |
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Description:
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1. Nano-DLC coating
2. DLC (diamond-like carbon) is the combination of diamond (SP3) and graphite (SP2)
3. Applied in the molds made of sinter; optical disk, LCD, and mechanical parts of low-friction cutting tools for non-ferrous metals
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Specification:
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1. chamber size:O700*580
2. coating zone:O160*200
3. ion sources:4 sets
4. pumping speed:< 5*10-5 torr within 40 min.
5. ultimate pressure:<5*10-6 torr
6. coating pressure:1*10-4 torr~ 2*10-2 torr
7. pumping systems:Rotary Pump & Turbo Pump
8. gases:Ar、N2 、 CxHyAz
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